ÉòÑôÍؾ£¿Æ¼¼ÓÐÏÞ¹«Ë¾½¨ÉèÓÚ2010Äê4Ô£¬ÊÇÓÉÍâÑóר¼ÒÍŶӺÍÖпÆÔºËùÊôÆóÒµÅäºÏÌᳫ½¨ÉèµÄ¹ú¼Ò¸ßÐÂÊÖÒÕÆóÒµ£¬×¨Òµ´Óʸ߶˰뵼Ì屡Ĥװ±¸µÄÑз¢¡¢Éú²ú¡¢ÏúÊÛÓëÊÖÒÕЧÀÍ¡£¹«Ë¾ÏȺóÈý´Î¼ç¸º¹ú¼Ò¿Æ¼¼ÖØ´óרÏ2016Äê¡¢2017Äê¡¢2019Äê»ñÆÀÖйú°ëµ¼ÌåÐÐҵлáÊÚÓèµÄ¡°Öйú°ëµ¼Ìå×°±¸ÎåÇ¿ÆóÒµ¡±³Æºô¡£¡¡¡¡
¹«Ë¾ÓµÓÐ12Ó¢´çPECVD£¨µÈÀë×ÓÌ廯ѧÆøÏà³Á»ý×°±¸£©¡¢ALD£¨Ô×Ӳ㱡Ĥ³Á»ý×°±¸£©¡¢3D NAND PECVD£¨Èýά½á¹¹ÉÁ´æרÓÃPECVD×°±¸£©Èý¸öÍêÕûϵÁвúÆ·£¬ÓµÓÐ×ÔÖ÷֪ʶ²úȨ£¬ÊÖÒÕÖ¸±êµÖ´ï¹ú¼Ê½ÏÏȽøˮƽ¡£²úÆ·ÆÕ±éÓ¦ÓÃÓÚ¼¯³Éµç·ǰµÀºÍºóµÀ¡¢TSV·â×°¡¢¹â²¨µ¼¡¢LED¡¢3D-NANDÉÁ´æ¡¢OLEDÏÔʾµÈ¸ß¶ËÊÖÒÕÁìÓò¡£¹«Ë¾²úÆ·ÏÖÔÚÒѵ¼È뺣ÄÚ¶à¼ÒÖ÷Á÷ÄÚ×ʾ§Ô²³§£¬Ò²ÊǺ£ÄÚΨһÔÚ°ëµ¼ÌåÁìÓò´ó¹æÄ£Á¿²úÓ¦ÓõĹú²ú×ÔÖ÷PECVD×°±¸¹«Ë¾¡£